Teaching method and processing system

ABSTRACT

A teaching method for storing in a controller a target moving position of a transfer mechanism in a processing system includes the steps of temporarily stopping the transfer mechanism in the middle of a moving route to a temporary moving destination position so as to make sure that the transfer mechanism does not interfere with another members at a potential interference location where there is a possibility that the transfer mechanism interferes with said another member, resuming to move the temporarily stopped transfer mechanism by inputting a moving instruction, repeating the temporarily stopping step and the resuming step, and when the pick reaches the temporary moving destination position, storing, as the target moving position, in the controller a position of the pick after adjusting and moving or without adjusting and moving the position of the pick.

This application is a Continuation Application of PCT InternationalApplication No. PCT/JP03/11734 filed on Sep. 12, 2003, which designatedthe United States.

FIELD OF THE INVENTION

The present invention relates to a processing system for performing apre-specified processing on an object to be processed such as asemiconductor wafer and a teaching method of a transfer mechanismemployed in such a processing system.

BACKGROUND OF THE INVENTION

In general, in order to manufacture a semiconductor integrated circuit,various processings such as film forming, etching, oxidation anddiffusion are performed on a wafer. Further, in order to improve athroughput and a yield along with the trend of miniaturization and highintegration of the semiconductor integrated circuit, a semiconductorprocessing system known as a so-called cluster tool has been developed,wherein a plurality of processing apparatuses performing either a sameprocess or different processes are coupled to each other via a commontransfer chamber such that various processes can be successivelyexecuted without exposing a wafer to the atmosphere.

In such a processing system for example, a semiconductor wafer isunloaded from a cassette container installed at an inlet port for anobject to be processed, which is disposed at a front end of theprocessing system, and then carried into an inlet side transfer chamberof the processing system by a transfer mechanism. Next, the wafer issubjected to a position alignment process carried out by an orienter andthen is loaded into a vacuum evacuable load-lock chamber. By anothertransfer mechanism, the wafer is then loaded into a common vacuumtransfer chamber whose peripheral portions are connected to a pluralityof vacuum processing chambers, and then sequentially loaded into thevacuum processing chambers via the common transfer chamber located atthe center so that the wafer can be processed continuously. Thereafter,the processed wafer returns to the original cassette container along theoriginal path, for example.

As described above, such a processing system includes therein a singleor a plurality of transfer mechanisms and delivery/reception andtransfer of the wafer are automatically performed by such transfermechanisms.

Such a transfer mechanism has, e.g., a horizontally movable,stretchable, bendable, revolvable and elevatable multi-joint arm andserves to transfer the wafer to a specified position by horizontallymoving to a transfer location while directly holding the wafer on a pickprovided at a leading end of such arm.

In this case, there arises a need to prevent the arm, the pick, and/orthe wafer held thereon from interfering or colliding with another memberwhile operating the transfer mechanism. And also, the wafer disposed ata specified position needs to be transferred to a target position whilebeing properly held, and then delivered and received at a properlocation with high accuracy, e.g., with high positional accuracy notlarger than ±0.20 mm.

Accordingly, in case an apparatus is assembled or extensivelyreconstructed for example, a so-called teaching is carried out.Specifically, the teaching is an operation for storing, in a controllerof a computer for controlling an operation of the transfer mechanism,position coordinates of important positions, e.g., locations at whichthe delivery/reception of the wafer W is carried out, in a moving routeof the pick of the transfer mechanism.

The teaching is performed in almost every case for performing the waferdelivery/reception to store position coordinates indicating, e.g., arelationship between positions of a transfer mechanism and a cassettecontainer, that between vertical positions of a pick for holding thewafer and each mounting rack of the cassette container, that betweenpositions of a mounting table in a load-lock chamber and the pick, thatbetween positions of the pick and an orienter, and that betweenpositions of the pick and a susceptor in each processing chamber.Further, it is to be noted that every driving unit is equipped with anencoder or the like for specifying driving positions thereof.

Specifically, a teaching operation is carried out as follows. First,position coordinates of all positions that need teaching in an apparatusare obtained from design values of the apparatus by setting apredetermined point in the moving route of the transfer mechanism as anabsolute reference. Then, the position coordinates are inputted to andstored in the controller as temporary position coordinates. In thiscase, each of the temporary position coordinates is inputted byconsidering a specified margin so as to make sure that the pick does notinterfere with another member.

Next, when the pick is moved close to a teaching reference position byoperating the transfer mechanism based on each of the temporary positioncoordinates, the operation of the transfer mechanism is converted into anonautomatic (hereinafter, also referred to as “manual”) mode, and thetransfer mechanism is slowly moved manually while keeping with naked eyethe pick from interfering with another member. Further, the transfermechanism is operated while being checked with the naked eye to makesure that a position aligning substrate previously installed at apredetermined position in the cassette container is in contact with thepick at a proper position. Then, the coordinates thereof are stored inthe controller as position coordinates, thereby performing the teaching.

Moreover, in case the teaching is performed for a mounting table and/ora susceptor in a load-lock chamber and/or each processing chamber, aposition aligning substrate is installed at each center thereof. Then, acorresponding pick is automatically moved to a position close to theposition aligning substrate where it is safe from any interference.Thereafter, the pick is manually moved so that both of them can beprecisely aligned with each other as described above and, then, positioncoordinates at that instant are stored in the controller. Furthermore,the position aligning substrate is made of, e.g., a transparent platehaving thereon pre-drawn contours of a pick, a mounting table and/or thelike that should be aligned therewith.

Further, the term nonautomatic (manual) operation denotes an operationfor moving the arm including the pick or the like by inputting adirection (+/−) and a magnitude of movement into the controller with theuse of a keyboard and/or a joystick.

In a prior art reference of Japanese Patent Laid-open Application No.2000-127069, an orienter is used to achieve a labor reduction and a highaccuracy of the teaching operation. However, there remains a drawback inthat the manual operation is required in a part of the teachingoperation.

SUMMARY OF THE INVENTION

In the aforementioned teaching method, the transfer mechanism itself isautomatically moved to a safe enough position near a teachingdestination position and, then, while being checked on safety with thenaked eye, the pick is manually moved by a micro-distance in ahorizontal direction and a vertical direction to thereby be moved to thedestination position.

Accordingly, even if the pick is automatically moved to a sufficientlysafe position near the destination position initially, a section formanually moving the pick by a minute distance becomes quite long, whichresults in a considerably long teaching operation time. Especially, sucha teaching operation should be performed for almost all thedelivery/reception positions of a semiconductor wafer as describedabove; and, thus, there is a drawback in that the teaching operationtime becomes quite long.

The present invention has been conceived to effectively solve theaforementioned drawback. An object of the present invention is toprovide a teaching method and a processing system capable of drasticallyreducing and shortening a teaching operation time.

The inventors have intensively conducted a research on a time reductionof a teaching operation and found that even after a transfer mechanismhas been automatically moved near a destination position, there stillexists some room for a pick automatically to be moved before reachingthe destination position if the pick of the transfer mechanism ismaneuvered to move while watching out for specific locations. Thepresent invention has been conceived from the above observation.

In accordance with one aspect of the invention, there is provided ateaching method for storing in a controller a target moving position ofa transfer mechanism in a processing system provided with the transfermechanism for transferring an object to be processed by supporting samewith a pick, the teaching method including the steps of: temporarilystopping the transfer mechanism in the middle of a moving route to atemporary moving destination position so as to make sure that thetransfer mechanism does not interfere with another members at apotential interference location where there is a possibility that thetransfer mechanism interferes with said another member; resuming to movethe temporarily stopped transfer mechanism by inputting a movinginstruction; repeating the temporarily stopping step and the resumingstep; and when the pick reaches the temporary moving destinationposition, storing, as the target moving position, in the controller aposition of the pick after adjusting and moving or without adjusting andmoving the position of the pick.

The transfer mechanism is temporarily stopped only at a location wherethere is a possibility of interference with another member and thenadjusted and moved if necessary. On the other hand, the transfermechanism is automatically moved in a location where there is nopossibility of interference with another member. Accordingly, a teachingoperation time can be greatly reduced.

In this case, the transfer mechanism can be adjusted and moved to alocation where there is no possibility of interference with anothermember in case there is a possibility that the temporarily stoppedtransfer mechanism interferes with said another member.

Further, the potential interference location can be calculated andobtained in advance by the controller based on design values of theprocessing system.

Furthermore, the controller can display on a display unit a message forinforming an operator of a potential interference whenever the transfermechanism is temporarily stopped.

Since the display unit displays thereon the message for informing thepotential interference, the operator recognizes the message and,accordingly, it is possible to more effectively prevent the transfermechanism from interfering with another member.

Moreover, an arm of the transfer mechanism is preferably a stretchable,bendable and revolvable multi-joint arm.

Besides, the target moving position is preferably a position in an inletport for loading the object to be processed into the processing system.

In accordance with another aspect of the invention, there is provided aprocessing system including a processing chamber for performing aprocessing on an object to be processed; an inlet port for introducingthe object to be processed; an orienter for performing a positionaligning of the object to be processed; a transfer mechanism, having apick for supporting the object to be processed, for transferring theobject to be processed; and a controller for controlling an operation ofthe transfer mechanism, wherein the controller is configured to performthe steps of: temporarily stopping the transfer mechanism in the middleof a moving route to a temporary moving destination position so as tomake sure that the transfer mechanism does not interfere with anothermember at a potential interference location where there is a possibilitythat the transfer mechanism interferes with said another member;resuming to move the temporarily stopped transfer mechanism by inputtinga moving instruction; repeating the temporarily stopping step and theresuming step; and when the pick reaches the temporary movingdestination position, storing, as the target moving position, in thecontroller a position of the pick after adjusting and moving or withoutadjusting and moving the position of the pick.

In this case, the controller can calculate and obtain in advance thepotential interference location based on design values of the processingsystem.

Further, the controller can be connected to a display unit and displayon the display unit a message for informing an operator of a potentialinterference whenever the transfer mechanism temporarily is stopped.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects and features of the present invention willbecome apparent from the following description of preferred embodiments,given in conjunction with the accompanying drawings, in which:

FIG. 1 is a diagram for showing an exemplary processing system forperforming a teaching method of the present invention;

FIG. 2 shows a schematic diagram of the processing system illustrated inFIG. 1;

FIG. 3 illustrates a schematic diagram depicting an inlet port;

FIG. 4 depicts a schematic diagram describing an orienter;

FIG. 5 describes a schematic diagram showing a load-lock chamber;

FIG. 6 provides a top view illustrating an operating unit;

FIG. 7A presents a diagram depicting a first potential interferencelocation, as an example in which a teaching operation is performed forthe inlet port in accordance with a first preferred embodiment of amethod of the present invention;

FIG. 7B represents a diagram depicting a second potential interferencelocation, as an example in which the teaching operation is performed forthe inlet port in accordance with the first preferred embodiment of themethod of the present invention;

FIG. 7C offers a diagram depicting a third potential interferencelocation, as an example in which the teaching operation is performed forthe inlet port in accordance with the first preferred embodiment of themethod of the present invention;

FIG. 7D is a diagram showing a temporary moving destination position, asan example in which the teaching operation is performed for the inletport in accordance with the first preferred embodiment of the method ofthe present invention;

FIG. 7E shows a diagram illustrating a target moving position, as anexample in which the teaching operation is performed for the inlet portin accordance with the first preferred embodiment of the method of thepresent invention;

FIG. 8 illustrates a flowchart depicting a flow of the teaching methodof the present invention;

FIG. 9 depicts a diagram describing an example in which a teachingoperation is performed for the orienter in accordance with a secondpreferred embodiment of the present invention;

FIG. 9A presents a diagram showing a first potential interferencelocation, as an example in which the teaching operation is performed forthe orienter in accordance with the second preferred embodiment of thepresent invention;

FIG. 9B represents a diagram illustrating a second potentialinterference location, as the example in which the teaching operation isperformed for the orienter in accordance with the second preferredembodiment of the present invention;

FIG. 9C provides a diagram depicting a temporary moving destinationposition, as the example in which the teaching operation is performedfor the orienter in accordance with the second preferred embodiment ofthe present invention;

FIG. 9D offers a diagram describing a target moving position, as theexample in which the teaching operation is performed for the orienter inaccordance with the second preferred embodiment of the presentinvention;

FIG. 10A is a diagram showing a first potential interference location,as an example in which a teaching operation is performed for theload-lock chamber in accordance with a third preferred embodiment of thepresent invention;

FIG. 10B shows a diagram illustrating a second potential interferencelocation, as the example in which the teaching operation is performedfor the load-lock chamber in accordance with the third preferredembodiment of the present invention;

FIG. 10C depicts a diagram describing a third potential interferencelocation, as the example in which the teaching operation is performedfor the load-lock chamber in accordance with the third preferredembodiment of the present invention;

FIG. 10D provides a diagram depicting a fourth potential interferencelocation, as the example in which the teaching operation is performedfor the load-lock chamber in accordance with the third preferredembodiment of the present invention; and

FIG. 10E sets forth a diagram illustrating a temporary movingdestination position, as the example in which the teaching operation isperformed for the load-lock chamber in accordance with the thirdpreferred embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter, a teaching method and a preferred embodiment of aprocessing system in accordance with the present invention will bedescribed with reference to the accompanying drawings.

FIG. 1 is a diagram for showing an exemplary processing system forperforming a teaching method of the present invention; FIG. 2 shows aschematic diagram of the processing system illustrated in FIG. 1; FIG. 3illustrates a schematic diagram depicting an inlet port; FIG. 4 depictsa schematic diagram describing an orienter; FIG. 5 describes a schematicdiagram showing a load-lock chamber; and FIG. 6 provides a top viewillustrating an operating unit.

First, the processing system will be described.

As shown in FIG. 1, a processing system 2 has a plurality of, e.g.,four, processing chambers 4A, 4B, 4C and 4D; an approximately hexagonshaped common transfer chamber 6; a first and a second load-lock chamber8A and 8B having a load-lock function; and a narrow and long inlet sidetransfer chamber 10.

Specifically, each of the processing chambers 4A to 4D is connected toone of four sides of the approximately hexagon shaped common transferchamber 6, and the first and the second load-lock chamber 8A and 8B areconnected to other two sides thereof, respectively. Further, the inletside transfer chamber 10 is connected to both the first and the secondload-lock chamber 8A and 8B.

The four processing apparatuses 4A to 4D and the first and the secondload-lock chamber 8A and 8B are respectively connected to the commontransfer chamber 6 via airtightly openable/closable gate valves G,thereby forming a cluster tool. They can communicate with an inside ofthe common transfer chamber 6, if necessary. Further, the first and thesecond load-lock chamber 8A and 8B are connected to the inlet sidetransfer chamber 10 via airtightly openable/closable gate valves G,respectively.

The four processing apparatuses 4A to 4D respectively have thereinsusceptors 12A to 12D, each for mounting thereon a semiconductor waferas an object to be processed and, further, are designed in a way that asame process or different processes are performed on the semiconductorwafer W as an object to be processed. A second transfer mechanism 14having stretchable, bendable, elevatable and revolvable multi-joint armsis provided at a position accessible to any of the two load-lockchambers 8A and 8B and the four processing chambers 4A to 4D. The secondtransfer mechanism 14 has two picks B1 and B2 that are independentlymovable in opposite directions and, thus, can carry two wafers at atime. Further, the second transfer mechanism 14 having a single pick canbe used.

The inlet side transfer chamber 10 is of a horizontally lengthened box.Formed at one side of the horizontally lengthened box is a single or aplurality of, e.g., three in this embodiment, loading ports 16 eachhaving an openable/closable opening/closing door 21. Further, inletports 18A to 18C are disposed correspondingly to the loading ports 16,respectively. Cassette containers 20 can be mounted on the inlet ports18A to 18C, respectively. Each of the cassette containers 20 canaccommodate therein a plurality of, e.g., 25, wafers W mounted inmulti-levels at an equal pitch. An opening/closing cover 20A (see FIG.3) is attached to each of the cassette containers 20. Referring to FIG.3, there is illustrated a central inlet port 18B among the three inletports 18A to 18C at which a driving unit 21A of the opening/closing door21, which is movable up and down and also forward and backward foropening and closing the opening/closing cover 20A of the cassettecontainer 20, is installed.

Provided in the inlet side transfer chamber 10 is a first transfermechanism 22 for transferring the wafer W in a length direction thereof.The first transfer mechanism 22 is slidably supported on a guide rail 24extending in the length direction in a central portion of the inlet sidetransfer chamber 10. The guide rail 24 has therein, e.g., a linear motorhaving an encoder as a moving mechanism, and the first transfermechanism 22 moves along the guide rail 24 by the linear motor.

Further, the first transfer unit 22 has two multi-joint arms 32 and 34installed in two vertical steps. Bifurcated picks A1 and A2 are attachedto leading ends of the multi-joint arms 32 and 34, respectively, and awafer W is directly held on each of the picks A1 and A2. Each of themulti-joint arms 32 and 34 is stretchable, bendable in a radialdirection and elevatable, and the stretching and bending of themulti-joint arms 32 and 34 can be individually controlled. Respectiverotation axes of the multi-joint arms 32 and 34 are rotatably connectedto a base 36 in a coaxial shape and, for example, can rotate as a singlebody in a revolving direction relative to the base 36. Further, a singlepick can be provided instead of the two picks A1 and A2.

Disposed at the other end of the inlet side transfer chamber 10 is anorienter 26 for performing a position aligning of the wafer. Provided inthe middle of the length direction of the inlet side transfer chamber 10are the two load-lock chambers 8A and 8B via the openable/closable gatevalves G, respectively.

As shown in FIG. 4, the orienter 26 has a rotatable table 28 rotated bya driving motor 27 and rotates while having the wafer W mounted thereon.Provided at an outer circumferential portion of the rotatable table 28is an optical sensor 30 for detecting a peripheral portion of the waferW. Accordingly, the optical sensor 30 can detect a location/direction ofa position determiner, e.g., a notch or an orientation flat, and amisalignment of a center of the wafer W.

Further, respectively installed in the first and the second load-lockchamber 8A and 8B are mounting tables 38A and 38B having a diametersmaller than a wafer diameter, for temporarily mounting the wafer Wthereon (see FIG. 5). Moreover, operations of the processing system 2,e.g., operations of the transfer mechanisms 14 and 22 and the orienter26 and the like, are entirely controlled by the controller 40 having amicrocomputer or the like. Connected to the controller 40 is anoperating unit 41 provided with a display unit 42 including a liquidcrystal display unit for informing an operator of a specific message anda key set 44 such as ten keys for input. Further, by employing a touchpanel for the display unit 42, a function of the key set 44 can also beserved by the display unit 42. The teaching operation is performed withthe use of the operating unit 41 while observing the pick or the like.

Hereinafter, a teaching method performed in the processing systemconfigured as described above will be described.

Above all, a target moving position of each of the transfer mechanisms14 and 22 for transferring and transporting the semiconductor wafer W isnot determined by merely setting up the aforementioned processing system2 and, therefore, there is a need to store the target moving position ascoordinates in a control system thereof. Such operation is referred toas a teaching. In this case, due to an assembly error of the processingsystem 2 or an error in an initial setting of each of the transfermechanisms 14 and 22, a temporary moving destination position determinedby a calculation based on design values of each unit is generally alittle bit different from a target moving position in the assembledprocessing system 2.

Therefore, if the transfer mechanism including the pick is automaticallymoved to the target moving position obtained by the calculation based onthe design values of the processing system in order to carry out theteaching operation, there is a possibility of interference with anothermember on a moving route. Accordingly, in the conventional teachingoperation, the transfer mechanism is automatically moved to an immediatefront of the temporary moving destination position obtained by thecalculation, i.e., a position free from any interference with anothermember and at the same time nearest to the temporary moving destinationposition. Thereafter, as described above, the transfer mechanism ismoved by a micro-distance by the manual operation while being checkedwith naked eyes to make sure that there is no interference with anothermember, thereby finally positioning the pick at a proper position andstoring coordinates thereof as a target moving position. However, insuch conventional teaching operation, a considerable time is required tomove the transfer mechanism by the manual operation while checking withthe naked eyes, which results in a long teaching operation time.

Thus, the teaching method of the present invention includes the steps oftemporarily stopping the transfer mechanism in the middle of a movingroute to a temporary moving destination position so as to make sure thatthe transfer mechanism does not interfere with another member at apotential interference location where a possibility of interference withanother member is anticipated; resuming to move the temporarily stoppedtransfer mechanism by inputting a moving instruction; repeating thetemporarily stopping step and the resuming step; and when the pickreaches the temporary moving destination position, storing, as thetarget moving position, in the controller a position of the pick, afteradjusting and moving or without adjusting and moving the position of thepick. In other words, a position where the transfer mechanism mayinterfere or collide with another member in the middle of the movingroute to the temporary moving destination position obtained based on thedesign values of the processing system is obtained in advance as apotential interference location. In order to obtain such potentialinterference location, a size and a revolving radius of a multi-jointarm and a pick of the transfer mechanism and the like are additionallyrequired. Such potential interference location is influenced by theassembly error of the processing system and/or the error in the initialsetting of a driving unit of the transfer mechanism, and is a location(a spot) where the transfer mechanism including the pick and anothermember are as close as, e.g., about 1 cm. Further, in case suchadjustment and movement has been performed, coordinates of a nextpotential interference location where the transfer mechanism temporarilystops are increased/decreased by a magnitude of the adjustment andmovement.

As described above, once a potential interference locations is obtainedby the calculation, an automatic operation of the transfer mechanism isactually performed. In this case, whenever the transfer mechanismreaches the potential interference location, the transfer mechanismtemporarily stops and, then, it is checked with the naked eye whether ornot the transfer mechanism interferes with another member even in a nextstep. At this time, if the possibility that the transfer mechanisminterferes with another member is anticipated, the operator adjusts andmoves the transfer mechanism by the manual operation to a position freefrom the interference with another member.

Next, the operator inputs a moving instruction, thereby automaticallymoving the transfer mechanism to a next potential interference location.Further, the aforementioned confirmation by naked eyes that there is nointerference, the adjustment and movement performed if necessary, andthe input of the moving instruction are sequentially and iterativelyperformed.

Moreover, if the pick reaches the temporary moving destination positionobtained based on the design values of the processing system and thelike, if necessary, the operator adjusts and moves the pick to anoptimal position by the manual operation while checking with naked eyesand, then, stores such position in the controller as a target movingposition. Accordingly, the teaching operation for an original targetmoving position is completed.

First Preferred Embodiment

Hereinafter, an exemplary teaching operation performed for an inlet portwill be described with reference to FIGS. 7A to 7E and FIG. 8.

FIGS. 7A to 7E show an exemplary teaching operation performed for theinlet port in accordance with a first preferred embodiment of a methodof the present invention, and FIG. 8 illustrates a flowchart depicting aflow of a teaching method of the present invention. Referring to FIGS.7A to 7E, there is illustrated a case where a teaching operation of onepick A1 of the first transfer mechanism 22 is performed for a centralinlet port 18B among three inlet ports 18A to 18C. In this case, aposition aligning substrate W formed in the same size and shape of asemiconductor wafer is mounted on a lowest supporting bracket (notshown) of the cassette container 20, and a position (FIG. 7D) where thepick A1 accesses right under the position aligning substrate W isassumed to be a temporary moving destination position. Further, if theposition of the pick relative to the position aligning substrate mountedon the lowest supporting bracket is determined, the pick will be able tohave an access to each supporting bracket based on a specified pitch ofthe supporting bracket.

First, as described above, a potential interference location where thetransfer mechanism 22 is anticipated to interfere with another member inthe middle of the moving route from the reference position of the firsttransfer mechanism 22 to the temporary moving destination positionillustrated in FIG. 7D is obtained in advance based on the design valuesof the processing system and the size and the revolving radius of themulti-joint arms of the transfer mechanism 22. In such case, theposition where the transfer mechanism 22 and another member are as closeas, e.g., 1 cm based on the design values is determined to be apotential interference location, and such information is stored in thecontroller 40. In FIGS. 7A to 7E, three positions of the arm, which areillustrated in FIGS. 7A to 7C, are obtained as respective potentialinterference locations. Further, a position of a right end portion ofthe guide rail 24 shown in FIG. 2 is assumed to be a reference position(home position) 50 of the first transfer mechanism 22.

In a state that the first transfer mechanism 22 is positioned at thereference position 50 (see FIG. 2), the operator inputs the movinginstruction by pressing a go button 44A (see FIG. 6) of the key set 44connected to the controller 40 shown in FIG. 1 (step S1). If so, since acurrent position of the first transfer mechanism 22 is not a temporarymoving destination position (NO in step S2), the controller 40 controlsan operation of the first transfer mechanism 22 to move the transfermechanism 22 to a location corresponding to the inlet port 18B in, e.g.,a horizontal direction. Then, by moving the multi-joint arm in avertical direction and a revolving direction and, at the same time,stretching and bending the multi-joint arm (for example, extending themulti-joint arm in the horizontal direction), the pick A1 temporarilystops at a first potential interference location automatically, asdescribed in FIG. 7A (step S3).

The first potential interference location is where a distance X1 betweena leading end of the pick A1 and that of the position aligning substrateW is about 1 cm based on the design values of the processing system.When the first transfer mechanism 22 temporarily stops, the display unit42 displays thereon a message such as “Do not picks or the likeinterfere with another member?” to inform the operator of a potentialinterference of the pick, as shown in FIG. 6. Further, simultaneously orindependently, the same message can be transferred from a speaker or thelike in a voice.

At this time, the operator checks with naked eyes whether or not thepick A1 is positioned lower than a lower portion of another member,i.e., the position aligning substrate W by about 2 to 3 mm in a verticaldirection, e.g., whether or not there is a possibility of theinterference with the position aligning substrate W even if the pick A1moves forward (step S4). In case the possibility that the positionaligning substrate W interferes with the pick A1 is anticipated (YES instep S4), the operator adjusts and moves the pick A1 by a micro-distanceto a position free from the interference with the position aligningsubstrate W by the manual operation so that the pick A1 can bepositioned lower than the lower portion of the position aligningsubstrate W by about 2 to 3 mm (step S5). Such adjustment and movementis carried out by operating a move button 44C of the key set 44.

If the adjustment and movement of the pick A1 is completed, or if theoperator determines in the step S4 that there is no possibility that thepick A1 interferes with another member (NO in step S4), the operatorinputs the moving instruction by pressing the go button 44A (step S1).If so, the pick A1 of the first transfer mechanism 22 is slightly andautomatically moved forward to a position where a distance X2 that theleading end of the pick A1 overlaps a peripheral portion of the positionaligning substrate W is about 5 mm, i.e., to a second potentialinterference location, and then temporarily stops, as illustrated inFIG. 7B (NO in step S2 and step S3). Also in the case the pick A1temporarily stops, the display unit 42 displays thereon the message forinforming the potential interference of the pick. At this time, theoperator checks that the leading end of the pick A1 has entered underthe position aligning substrate W. A reason that the pick A1 temporarilystops at the position where an overlapped distance between the pick A1and the position aligning substrate W is about 5 mm is to minimizedamages if the pick A1 interferes with the position aligning substrateW.

Furthermore, if the operator inputs the moving instruction by pressingthe go button (step S1), the pick A1 of the first transfer mechanism 22is slightly and automatically moved forward to a location where ahorizontal distance X3 between a base portion of the pick A1 and a topportion of the opening/closing door 21 (see FIG. 3) is about 1 cm basedon the design values, as illustrated in FIG. 7C, i.e., to a thirdpotential interference location, and then temporarily stops. At thistime, the display unit 42 displays thereon the message for informing thepotential interference of the pick. In this case, the operator checksthe pick A1 such that the base portion thereof does not interfere withthe opening/closing door 21 even if the pick A1 is moved forward. If theoperator determines that there is a possibility for the interference ofthe base portion of the pick A1, the pick A1 is slightly adjustedupwardly by the manual operation, as described above.

Further, if the operator inputs the moving instruction by pressing thego button, the pick A1 of the first transfer mechanism 22 automaticallymoves forward again to a temporary moving destination position based onthe design values and then temporarily stops, as shown in FIG. 7D.Besides, in case there is the adjustment and movement in the middle of amoving route by the manual operation, the temporary moving destinationposition is shifted by a magnitude of the adjustment and movement.

Accordingly, if the pick A1 has been moved forward to the temporarymoving destination position (YES in step S2), the operator checkswhether or not the position is appropriate for the position aligningsubstrate W. Thereafter, if necessary, i.e., if the position ismisaligned, the pick A1 is adjusted and moved to a target movingposition by a micro-distance by the manual operation, so that the pickA1 can be positioned right under the position aligning substrate W, asillustrated in FIG. 7E (step S6). FIG. 7E shows a state that the pick A1has been moved upwardly by the micro-distance. In addition, if theposition of the pick A1 in the temporary moving destination positionshown in FIG. 7D is a proper position as shown in FIG. 7E, theadjustment and movement in the step S6 becomes unnecessary.

If the pick A1 has reached the proper position, i.e., the target movingposition, a save button 44B (see FIG. 6) of the key set 44 is pressed,thereby storing position coordinate data of the pick A1 in thecontroller 40 (step S8). Accordingly, the teaching operation iscompleted.

By storing the position coordinates of the target moving position in thecontroller 40, the pick A1 can automatically be moved to the targetmoving position without interfering with another member. In case thewafer is lifted in the cassette container 20, the wafer is received at aposition away from the target moving position by a specific height.Further, in case the wafer is received from another supporting bracket,since the supporting brackets provided in multi-levels have apredetermined pitch as described above, a height corresponding to thenumber of the supporting brackets can be easily calculated.

Such teaching operation is equally performed for a pick A2 and, further,for the picks A1 and A2 of other inlet ports 18A and 18C. By comparison,in the conventional teaching method, after the pick A1 is automaticallymoved to the first potential interference location illustrated in FIG.7A, the pick A1 is slightly moved to the location shown in FIG. 7E bythe manual operation.

Therefore, in the method of the present invention, the pick istemporarily stopped only at a potential interference location wherethere is a possibility that the pick or the like interferes with anothermember. Further, whenever the pick is temporarily stopped, if necessary,the pick is adjusted and moved by the manual operation and then isautomatically moved to a next potential interference location. As aresult, a moving time of the pick along an entire transfer path becomesshort and, thus, the teaching operation can be quickly carried out in ashort period of time.

Second Preferred Embodiment

Although the exemplary teaching operation performed for the inlet porthas been described in the first preferred embodiment, an exemplaryteaching operation performed for an orienter will be described in asecond preferred embodiment.

FIGS. 9A to 9D show the exemplary teaching operation performed for theorienter in accordance with the second preferred embodiment of thepresent invention. Further, FIGS. 9A to 9D partially provide top views.Also in the second embodiment, a teaching operation for the pick A1 ofthe first transfer mechanism 22 will be described. Further, whenever thepick A1 is temporarily stopped at a potential interference location, thedisplay unit displays thereon a message for informing the operator of apotential interference and the description thereof will be omitted.

As in the first preferred embodiment, a potential interference locationand a temporary moving destination position for the orienter 26 areobtained in advance based on the design values of the processing system2 and then stored in the controller 40. In the illustrated example,FIGS. 9A and 9B illustrate the potential interference locations, andFIG. 9C provides the temporary moving destination position.

First, if a moving instruction is inputted by pressing the go button 44A(see FIG. 6) in a state that the first transfer mechanism 22 ispositioned at the reference position 50 (see FIG. 2), the first transfermechanism 22 is automatically operated and, further, the pick A1 istemporarily stopped at a first potential interference location, asillustrated in FIG. 9A. The first potential interference location is aposition where a horizontal distance Y1 between a bulkhead 10A of theinlet side transfer chamber 10 to which the orienter 26 is attached anda leading end of the pick A1 is, e.g., about 1 cm based on the designvalues of the processing system. Accordingly, the leading end of thepick A1 can be prevented from colliding with the bulkhead 10A even if aheight of an opening of the orienter 26 is as short as about 3.6 cm. Atthe first potential interference location, the operator verticallyadjusts and moves the pick A1 by the manual operation, if necessary, sothat the pick A1 can enter into the orienter 26 without theinterference.

Next, if the operator inputs the moving instruction by pressing the gobutton, the pick A1 is automatically moved in the horizontal directionand then temporarily stopped at a second potential interferencelocation, as depicted in FIG. 9B. The second potential interferencelocation is a position where a horizontal distance Y2 between aperipheral portion of a rotatable table 28 and the pick A1 is, e.g.,about 1 cm based on the design values of the processing system. At thesecond potential interference location, if necessary, the operatoradjusts the position of the pick A1 in the horizontal direction by themanual operation so that the rotatable table 28 can be adequatelysurrounded by the pick A1 from the top view when the pick A1 is furthermoved. In other words, the position thereof is adjusted by the manualoperation so that the pick does not interfere with the rotatable table28 when the pick A1 is further moved.

Thereafter, if the operator inputs the moving instruction by pressingthe go button, the pick A1 is automatically moved in the horizontaldirection and then reaches a temporary moving destination position, asshown in FIG. 9C.

Further, if necessary, the operator adjusts and moves the pick A1 to aproper position, i.e., a target moving position, by the manualoperation, as illustrated in FIG. 9D. Furthermore, by pressing the savebutton 44B (see FIG. 6), position coordinate data thereof are stored inthe controller 40. In this case, before the save button 44B is pressed,for example, a transparent position aligning substrate W is mounted onthe pick A1, as shown in the top view of FIG. 9D and, then, it ischecked that the rotatable table 28 is positioned at an approximatelycentral portion of the position aligning substrate W.

In FIG. 9D, since the pick A1 is positioned under the rotatable table 28at the temporary moving destination position (see FIG. 9C), the pick A1is adjusted and moved upwardly by the manual operation and, further,properly positioned by using the position aligning substrate W.

Also in the second preferred embodiment, the pick is temporarily stoppedonly at a potential interference location where a possibility that thepick or the like interferes with another member is anticipated. Further,whenever the pick is temporarily stopped, if necessary, the pick isadjusted and moved by the manual operation, and then is automaticallymoved to a next potential interference location. Therefore, a movingtime of the pick along the entire transfer path is shortened and,accordingly, the teaching operation can be quickly performed in a shortperiod of time.

Third Preferred Embodiment

Hereinafter, a teaching operation performed for a load-lock chamber inaccordance with a third preferred embodiment will be described.

FIGS. 10A to 10E illustrate an exemplary teaching operation performedfor the load-lock chamber in accordance with the third preferredembodiment of the present invention.

Herein, an operation for teaching the pick A1 with respect to theload-lock chamber 8A between two load-lock chambers 8A and 8B will bedescribed as an example. The position aligning substrate W is mounted inadvance on the mounting table 38A in the load-lock chamber 8A. Further,four potential interference locations shown in FIGS. 10A to 10D areobtained based on the design values of the processing system. FIG. 10Epresents a temporary moving destination position. Moreover, since thedisplay on the display unit is same as in the aforementioned case, thedescription thereof will be omitted.

First, if a moving instruction is inputted by pressing the go button 44A(see FIG. 6) in a state that the first transfer mechanism 22 ispositioned at the reference position 50 (see FIG. 2), the first transfermechanism 22 is automatically operated and, further, the pick A1 istemporarily stopped at a first potential interference location, as shownin FIG. 10A. The first potential interference location is a positionwhere a horizontal distance Z1 between a bulkhead 10B of the inlet sidetransfer chamber 10 to which the load-lock chamber 8A is attached andthe leading end of the pick A1 is, e.g., about 1 cm based on the designvalues of the processing system. Accordingly, the leading end of thepick A1 can be prevented from colliding with the bulkhead 10B even if aheight of an opening of the load-lock chamber 8A is as short as about4.9 cm. At the first potential interference location, the operatorvertically adjusts and moves the pick A1 by the manual operation, ifnecessary, so that the pick A1 can enter into the load-lock chamber 8Awithout the interference.

Next, if the operator inputs the moving instruction by pressing the gobutton, the pick A1 is automatically moved in the horizontal directionand then temporarily stopped at a second potential interferencelocation, as depicted in FIG. 10B. The second potential interferencelocation is a position where a horizontal distance Z2 between aperipheral portion of the position aligning substrate W mounted on themounting table 38A and the pick A1 is, e.g., about 1 cm based on thedesign values of the processing system. At the second potentialinterference location, if necessary, the operator adjusts the positionof the pick A1 in the vertical and the horizontal direction by themanual operation, so that the mounting table 38A can be adequatelysurrounded by the pick A1 when the pick A1 is further moved. In otherwords, the position thereof is adjusted by the manual operation so thatthe pick A1 does not interfere with the mounting table 38A and theposition aligning substrate W when the pick A1 is further moved.

Thereafter, if the operator inputs the moving instruction by pressingthe go button, the pick A1 is slightly and automatically moved in thehorizontal direction and then temporarily stopped at a third potentialinterference location, as shown in FIG. 10C. The third potentialinterference location is a position where a horizontal distance Z3 thatthe peripheral portion of the position aligning substrate W verticallyoverlaps the leading end of the pick A1 is, e.g., about 5 mm based onthe design values of the processing system. The reason of temporarilystopping the pick A1 is to minimize damages if they interfere. At thistime, if necessary, the position of the pick A1 is adjusted by themanual operation such that the pick A1 does not interfere with anothermember by a next movement.

Next, if the operator inputs the moving instruction by pressing the gobutton, the pick A1 is slightly and automatically moved in thehorizontal direction and then temporarily stopped at a fourth potentialinterference location, as illustrated in FIG. 10D. The fourth potentialinterference location is a position where a horizontal distance Z4between a top portion of an open gate valve G and a base of the pick A1is, e.g., about 1 mm based on the design values of the processingsystem. The reason for temporarily stopping the pick A1 is to preventthe base portion of the pick A1 from colliding with the open gate valveG. At this time, if necessary, the position of the pick A1 is adjustedby the manual operation so that the pick A1 does not interfere withanother member by a next movement.

Then, if the operator inputs the moving instruction by pressing the gobutton, the pick A1 is automatically moved in the horizontal directionand then reaches a temporary moving destination position, as shown inFIG. 10E.

In addition, the operator adjusts and moves the pick A1 to a properposition, i.e., a target moving position by the manual operation, ifnecessary. Further, by pressing the save button 44B (see FIG. 6),position coordinate data thereof are stored in the controller 40. Inthis case, before the save button 44B is pressed, it is checked that thepick A1 is properly positioned relative to, e.g., the transparentposition aligning substrate W mounted on the mounting table 38A.

Also in the third preferred embodiment, the pick is temporarily stoppedonly at a potential interference location where the pick or the like isanticipated to interfere with another member is anticipated. Further,whenever the pick is temporarily stopped, if necessary, the pick isadjusted and moved by the manual operation, and then automatically movedto a next potential interference location. Therefore, the moving time ofthe pick along the entire transfer path is shortened and, accordingly,the teaching operation can be quickly performed in a short period oftime.

Furthermore, the aforementioned teaching operation is performed for thepicks A1 and A2 with respect to the load-lock chambers 8A and 8B.

The teaching method of the first transfer mechanism 22, which has beendescribed in each of the above-described embodiments, is equally carriedout for both picks B1 and B2 of the second transfer mechanism 14 in thecommon transfer chamber 6 with respect to the processing chambers 4A to4D and the load-lock chambers 8A and 8B.

Actually, after the teaching method is performed, the position aligningsubstrate W installed at each of the determined target moving positionsis automatically transferred to the orienter 26 and, further, coordinatedata of the target moving positions are further corrected based on amicro-variation of the position of the position aligning substrate W.

Since the aforementioned configurations of the processing system 1 andthe transfer mechanisms 14 and 22 are only examples, the teaching methodof the present invention can be applied to every transfer mechanisminstalled in an atmosphere of an atmospheric pressure and a vacuum.

Further, although a semiconductor wafer has been described as an exampleof an object to be processed, the method of the present invention can beapplied to a glass substrate, an LCD substrate or the like without beinglimited thereto.

As described above, the teaching method and the processing system of thepresent invention can provide following effects.

In accordance with the present invention, a transfer mechanism istemporarily stopped only at a spot (a location) where there is apossibility of interference with another member and then adjusted andmoved if necessary. On the other hand, the transfer mechanism isautomatically moved in a location where there is no possibility ofinterference with another member. Accordingly, a teaching operation timecan be greatly reduced.

Further, in accordance with the present invention, since a display unitdisplays thereon a message for informing a potential interference, anoperator recognizes the message and, accordingly, the transfer mechanismcan be prevented from interfering with another member more effectively.

While the invention has been shown and described with respect to thepreferred embodiments, it will be understood by those skilled in the artthat various changes and modifications may be made without departingfrom the spirit and scope of the invention as defined in the followingclaims.

1. A teaching method for storing in a controller a target movingposition of a transfer mechanism in a processing system provided withthe transfer mechanism for transferring an object to be processed bysupporting same with a pick, the teaching method comprising the stepsof: temporarily stopping the transfer mechanism in the middle of amoving route to a temporary moving destination position so as to makesure that the transfer mechanism does not interfere with another membersat a potential interference location where there is a possibility thatthe transfer mechanism interferes with said another member; resuming tomove the temporarily stopped transfer mechanism by inputting a movinginstruction; repeating the temporarily stopping step and the resumingstep; and when the pick reaches the temporary moving destinationposition, storing, as the target moving position, in the controller aposition of the pick after adjusting and moving or without adjusting andmoving the position of the pick.
 2. The teaching method of claim 1,wherein the transfer mechanism is adjusted and moved to a location wherethere is no possibility of interference with another member in casethere is a possibility that the temporarily stopped transfer mechanisminterferes with said another member.
 3. The teaching method of claim 1,wherein the potential interference location is calculated and obtainedin advance by the controller based on design values of the processingsystem.
 4. The teaching method of claim 1, wherein the controllerdisplays on a display unit a message for informing an operator of apotential interference whenever the transfer mechanism is temporarilystopped.
 5. The teaching method of claim 1, wherein an arm of thetransfer mechanism is a stretchable, bendable and revolvable multi-jointarm.
 6. The teaching method of claim 1, wherein the target movingposition is a position in an inlet port for loading the object to beprocessed into the processing system.
 7. The teaching method of claim 2,wherein the potential interference location is calculated and obtainedin advance by the controller based on design values of the processingsystem.
 8. The teaching method of claim 2, wherein the controllerdisplays on a display unit a message for informing an operator of apotential interference whenever the transfer mechanism is temporarilystopped.
 9. The teaching method of claim 2, wherein an arm of thetransfer mechanism is a stretchable, bendable and revolvable multi-jointarm.
 10. The teaching method of claim 2, wherein the target movingposition is a position in an inlet port for loading the object to beprocessed into the processing system.
 11. A processing system comprisinga processing chamber for performing a processing on an object to beprocessed; an inlet port for introducing the object to be processed; anorienter for performing a position aligning of the object to beprocessed; a transfer mechanism, having a pick for supporting the objectto be processed, for transferring the object to be processed; and acontroller for controlling an operation of the transfer mechanism,wherein the controller is configured to perform the steps of:temporarily stopping the transfer mechanism in the middle of a movingroute to a temporary moving destination position so as to make sure thatthe transfer mechanism does not interfere with another member at apotential interference location where there is a possibility that thetransfer mechanism interferes with said another member; resuming to movethe temporarily stopped transfer mechanism by inputting a movinginstruction; repeating the temporarily stopping step and the resumingstep; and when the pick reaches the temporary moving destinationposition, storing, as the target moving position, in the controller aposition of the pick after adjusting and moving or without adjusting andmoving the position of the pick.
 12. The processing system of claim 11,wherein the controller calculates and obtains in advance the potentialinterference location based on design values of the processing system.13. The processing system of claim 11, wherein the controller isconnected to a display unit and displays on the display unit a messagefor informing an operator of a potential interference whenever thetransfer mechanism temporarily is stopped.
 14. The processing system ofclaim 12, wherein the controller is connected to a display unit anddisplays on the display unit a message for informing an operator of apotential interference whenever the transfer mechanism temporarily isstopped.